Formation of SiC nanoparticles in an atmospheric microwave plasma

• Martin Vennekamp,
• Ingolf Bauer,
• Matthias Groh,
• Evgeni Sperling,
• Susanne Ueberlein,
• Maksym Myndyk,
• Gerrit Mäder and
• Stefan Kaskel

Beilstein J. Nanotechnol. 2011, 2, 665–673, doi:10.3762/bjnano.2.71

• size is mainly influenced by the concentration of the precursor material in the plasma. Keywords: atmospheric microwave plasma; nanoparticle; SiC; Introduction Silicon Carbide (SiC) is a solid with various applications in materials science. It is used, e.g., as a wear-resistant material, as a

• (Equation 2). On the other hand this experiment indicates a poorer crystallisation of the product, which is represented by a smaller effective particle size according to Equation 2. Discussion The synthesis of SiC by means of an atmospheric microwave plasma as a source of thermal energy for the

• carbide nanoparticles were produced by means of atmospheric-microwave-plasma induced decomposition of tetramethylsilane. The reaction conditions were varied to produce nanoparticles with a diameter from 7 to 20 nm depending on the reaction conditions. The main parameter controlling the size of the